Method of minimizing stacking element distortions in optical assemblies

ABSTRACT

A compound optical assembly is constructed from a plurality of stacking elements for spacing, aligning, and retaining optical elements within the assembly. Stacking faces of the stacking elements are measured and low-order surface errors are extracted, represented by mathematical approximations having a primary angular frequency. The stacking elements including the optic holders are relatively oriented to promote complementarity between the low-order surface errors of mating stacking faces.

This application claims the benefit of priority under 35 U.S.C. §119 ofU.S. Provisional Application Ser. No. 61/812,364 filed on Apr. 16, 2013the content of which is relied upon and incorporated herein by referencein its entirety.

TECHNICAL FIELD

The invention relates to optical assemblies and particularly to theassembly of stacking elements that are secured together for spacing,aligning, and retaining optical elements.

BACKGROUND OF THE INVENTION

Many optical assemblies, particularly those used for such purposes aslithographic projection or semi-conductor inspection, have strictrequirements for optical performance such as high transmission, lowpupil non-uniformity, low RMS wavefront errors, and low transmittedwavefront asymmetries. Design and tolerance considerations playimportant roles in meeting wavefront performance requirements. Forexample, design forms are chosen to reduce sensitivity to expected typesof errors accompanying the manufacture of optical components, andtolerances of the optical components are chosen with respect to thedesign sensitivities so that manufacturing variations do not severelyinfluence the system level performance. Nevertheless, the assembly or“build” of even properly designed and manufactured components canintroduce additional wavefront errors that degrade overall performanceFor example, assembly techniques such as bolting, threading, orotherwise fastening the optical components together can producemechanical stresses or strains on the optical components that candegrade wavefront performance of an optical assembly.

A variety of methods have been used to isolate optical components fromstresses transferred through their mountings. For example, flexures orsemi-kinematic style mounting methods have been incorporated into lensholders (e.g., “cells”). These methods isolate the lenses from thestresses or strains produced by fastening adjacent lens holders orspacers together to form an integral lens assembly. Other methods usehighly compliant adhesive layers between the lens elements and theholders to reduce deformations of the optical elements within the lensassemblies.

Methods have also been used to adjust optical elements based onperformance measurements. For example, lenses or groups of lenses havebeen rotated or otherwise adjusted relative to one another to optimizemeasured performance. Yet another method uses a “correction element”that is deterministically manufactured to cancel measured wavefronterrors of otherwise completed lens assemblies.

SUMMARY OF THE INVENTION

This invention in one or more of its preferred embodiments provides forreducing sources of error in optical assemblies by reducing or otherwisecontrolling stresses or strains that might otherwise arise betweenproperly designed, toleranced, and manufactured optic holders orspacers, which are more generally referred to herein as stackingelements. The faces of various stacking elements intended for matingwith other stacking element faces can be measured in advance ofassembly, and low-order surface errors can be extracted from themeasurements and expressed as mathematical approximations havingprincipal (i.e., highest amplitude) frequencies. The error measurementscan be used to arrange the stacking elements during assembly or toprearrange the stacking elements in advance of assembly. In situmeasurements of exposed element faces during assembly can be used incombination with the error measurements of the individual faces of thestacking elements made prior to the assembly for such purposes asdiminishing cumulative errors in a growing stack and avoiding stressesor strains on the optic holders within the stack.

The measured stacking elements can be grouped in combinations andrelative angular orientations that juxtapose mating stacking faceshaving substantially complementary low-order surface errors with commonor harmonic principal frequencies (e.g. radial or angular principalfrequencies). Optical elements can be mounted in the optic holders priorto or during assembly of the stacking elements, and the combinations ofstacking elements can be fastened together via compressive forces whileminimizing accompanying stresses or strains that would otherwise distortthe optic holders within other combinations. By reducing stresses orstrains in the optic holders, less stress or strain is transferredbetween the optic holders and the optical elements supported by theholders (e.g., lenses) to achieve desired optical performance.

The surface error measurements of the stacking elements can be used incombination with in situ measurements made during a progressive assembly(i.e., “build) of the stacking elements. As each stacking element orgroup of stacking elements is secured together, an exposed stacking faceof an intermediate stacking element (i.e., a stacking element alreadysecured to a base mounting element or another stacking element) can bemeasured in situ to monitor cumulative low-order errors in the assembly,which can also be represented by mathematical approximations havingprincipal frequencies. The next (adjoining) stacking element, whoseadjacent surface errors can be premeasured, can be relatively orientedwith respect to the intermediate stacking element to reduce thecumulative error, so that mating stacking faces of the intermediate andnext stacking elements can be secured together via compressive forceswhile minimizing stress or strain that would otherwise distort one ormore of the optic holders. The goal is not necessarily to minimize allstresses and strains in the stacking elements themselves but to reducethe stresses or strains that would otherwise distort the optic holdersand thereby transfer to the optics of the optical assembly.

The faces of the adjacent stacking elements can be premeasured andpaired with each other prior to or during assembly. In fact, mechanicaltolerances for individual stacking elements can be relaxed so long asthe measured low-order errors among mating faces are sufficientlycomplementary and the overall spacing and tilt tolerances are met.

Thus, prior to or during the assembly of compound optics, such asprojection lenses, combinations of stacking elements (where choices areavailable) and their relative orientations can be identified forreducing or otherwise controlling stresses or strains accompanying theassembly of the compound optics. Prior to assembly, the faces of thestacking elements can be measured and low-order surface errors,including principal frequencies, identified. Adjacent stacking elementsand/or their relative orientations can be chosen so that mating stackingfaces have substantially complementary low-order surface errors withcommon or harmonic principal angular frequencies. Higher order errorscan be considered for cumulative residual effects, but the principalfrequencies best characterize the overall shapes of the faces and thepossibilities for imparting unwanted stresses or strains.

The stacking elements generally include openings for the transmission oflight through the optical elements supported by the stacking elements,and the principal angular frequencies can correspond to numbers of lobesprojecting from the stacking faces along traces that circumnavigate theapertures.

The optimal relative orientations of the mating stacking faces havingmatching or integer multiple numbers of lobes can be determined as arelative displacement in phase around the apertures in angularincrements equal to π divided by the number of lobes. Thus, stackingelements having mating faces with complementary surface forms can benested together in particular relative orientations to generate lessstress or strain on the optic holders within the assembly.

Lesser degrees of complementarity can also be exploited between matingstacking faces having different principal angular frequencies byrelative angular orientations that minimize the difference betweensurfaces, i.e., the residual mismatch. While the available solutions maybe less than ideal, stress and strain on the optic holders can still bereduced by combinations and relative orientations that provide forminimizing the residual mismatch between mating faces of the stackingelements.

Preferably, the stacking faces are premeasured interferometrically, andthe interferometric measurements are filtered to obtain the mathematicalapproximations of the low-order surface errors. The mathematicalapproximations can include orthonormal polynomials having a radial orderand an angular frequency referenced to datum feature (e.g., a fiducialmark or an identified feature) on the stacking elements. In addition tohaving common or harmonic angular frequencies, the complementarylow-order surface errors of the mating stacking faces preferably havecommon or harmonic primary radial orders of opposite signs.

Cumulative residual low-order surface errors between mating stackingfaces associated with any remaining departures in complementarity can beestimated in advance of assembly or measured during the course ofassembly from the exposed faces of intermediate stacking elements.Pairings of mating stacking faces can be arranged relative to otherpairings of mating stacking faces so that the departure incomplementarity of one pairing is complementary to the departure incomplementarity of one or more other pairings to avoid an accumulationof stress or strain between the pairings that would otherwise distortthe optic holders within the combinations of stacking elements.

BRIEF DESCRIPTION OF THE DRAWING FIGURES

FIG. 1 is a diagram of a grazing incidence interferometer for measuringsurface height variations of stacking element faces.

FIG. 2 is an enlarged diagram showing the splitting of a central rayinto a reference ray reflected from a prism reference surface and anobject ray reflected from a stacking element face.

FIG. 3 is a plan view of an interference pattern formed on a diffusescreen of the interferometer.

FIG. 4 is a gray-scale image of an interference pattern appearingtogether with an image of the stacking element face.

FIGS. 5A-5C are exaggerated images of low-order surface errors that canbe used to characterize the stacking element faces.

FIGS. 6A and 6B are perspective views of an individual stacking elementin the form of an optic holder with a cut-away view in FIG. 6B showing across section.

FIGS. 7A and 7B are perspective views of at least a partial assembly offour stacking elements with a cut-away view in FIG. 7B showing a crosssection of the assembly.

FIGS. 8A and 8B are perspective views of the low-order surface errors ofmating stacking element faces in two different relative rotationalpositions with FIG. 8B showing a preferred relative position forpromoting complementarity between the error surfaces.

FIG. 9 is a flow chart presenting steps for building an optical assemblyusing both premeasures of the stacking element faces and in situmeasures of the exposed faces of a growing stack.

DETAILED DESCRIPTION OF THE INVENTION

Grazing incidence interferometer 10, as shown in FIG. 1, is an exampleof an instrument that can be used for measuring surface errors, e.g.,departures from flatness, of a stacking element 12. A light source 14,such as a laser diode, emits a beam 18 of temporally coherent light,which a focusing lens 16 sets on an initially converging path.

A coherence adjuster 20 having a rotating diffuser plate 22 interrupts anarrowed portion of the beam 18 to reduce spatial coherence of the beam18. The rotating diffuser plate 22 interrupts the beam 18 and randomlyscatters light illuminating a spot 23 on the diffuser plate 22. Thelight scattered from the spot 23 emulates an extended light source,whose size is inversely related to the degree of spatial coherence ofthe beam 18. The focusing lens 16 is movable in the directions of arrows24 to change the size of the illuminated spot 23 for adjusting thespatial coherence of the beam 18.

An expanding portion of the beam 18 propagates through a tilt mechanism26 having a reflective surface 28 and a pivot 30 for tilting thereflective surface 28 through a limited range of angles in thedirections of arrows 32. Similar amounts of beam tilt can be achieved byinterrupting the beam 18 with a pivotal plane parallel plate. Wheninclined from normal to the propagating beam 18, light transmits throughthe plate from an apparent source that is offset from the extended lightsource on the diffuser plate 22.

A collimating lens 34, whose focal length is measured from the diffuserplate 22, converts the expanding beam 18 into a nominally collimatedbeam 18 that approaches one side 36 of a triangular prism 40 at close tonormal incidence. The side 36 is preferably one of two equal lengthsides 36 and 38 that are inclined to a base 42 at approximately45-degree angles. Although expanded, residual divergence of thenominally collimated beam 18 is slightly increased by the limitedspatial coherence of the beam 18, and the average incident angle of thecollimated beam 18 approaching the prism 20 can depart slightly fromnormal by the tilt of the beam 18.

With reference to FIG. 2, a central ray 48 of the beam 18 propagatesthrough the prism 40 and is partially reflected from the base face 42 ofthe prism 40 through a non-normal grazing angle “α” as a reference beamray 50. The grazing angle “α” is defined as a non-normal angle inclinedfrom a reflective surface (the base face 42 of the prism 40) within arange of specular reflection. Angles of so-called “grazing incidence”are complementary to these “grazing angles”. Measures taken at grazingincidence increase reflectivity, allowing a wider range of surfaces,including non-specular reflective surfaces, to be interferometricallymeasured.

Another portion of the ray 48 is refracted from the base face 42 throughan air gap 60 before being reflected from a first face 56 of twoopposite side (i.e., top and bottom) faces 56 and 58 of the stackingelement 12 as an object beam ray 52. The reference beam ray 50 and theobject beam ray 52 exit the prism 40 through the prism face 38relatively sheared but nominally parallel to each other. Preferably, thenon-normal grazing angle “α” is at least approximately equal to thecomplement of a base angle of the prism 40 so that all of the rays 48,50, and 52 enter or leave the prism 40 at close to normal incidence.

The reference beam ray 50 is one of a number of rays from the beam 18that are reflected through the same grazing angle α at different pointsalong the base face 42 of the prism 40 to form a reference beam. Theobject beam ray 52 is one of the number of rays from the beam 18 thatare reflected at different points along the stacking element face 56 toform an object beam. The reference and object beams collectively form aninterference pattern 64 (see for example FIG. 3) on a diffused viewingscreen 70, which can be made of ground glass or plastic. Theinterference pattern 64 contains information concerning the flatness ofthe stacking element face 56.

The diffused viewing screen 70, which can be rotated or dithered tofurther randomize the diffusion, fixes an image of the interferencepattern 64 so than an ordinary zoom lens 72 (see FIG. 1) can project theimage onto a recording device 74, such as a charge-coupled device (CCD)camera. Other image-forming optics and recording devices can be used tocapture similar information from the interference pattern 64 appearingon the screen 70 or at other locations, such as at the base face 42 ofthe prism 40. A processor 76 receives the information captured by therecording device 74 for converting measures of intensity variations tomeasures of variations in surface height.

Phase shifting or other known techniques can be used to convert theintensity data recorded from the interference pattern 64 into measuresof height variation across the face 56. The relative optical pathlengths traversed by the reference and object beams can be varied tocycle individual points in the interference pattern 64 throughrespective cycles of constructive and destructive interference, so thatthe intensity of individual pixels captured by the recording device 74can be scaled to a phase value within a cycle of interference. Forexample, the tilt mechanism 26 can be controlled by the processor 76 toslightly vary the grazing angle α to vary the path length differencesbetween the reference and object beams.

Phase unwrapping techniques can be used to resolve ambiguities betweensimilarly appearing phases in different interference cycles so thatcumulative variations in phase across the face 56 covering multiplecycles of interference can be measured. Based on the known relationshipbetween variations in phase as fractions of the wavelength of themeasuring beam 18, variations in surface height across the face 56 canbe calculated.

The opposite side face 58 of the stacking element 12 can be similarlymeasured as well as the opposite side faces of other stacking elements.Other types of interferometers can also be arranged for measuring thefaces of stacking elements having mechanical, non-specular reflectivesurfaces including Fizeau grazing incidence interferometers,Shack-Hartmann wavefront analyzers, and white light interferometers.Compound interferometers can be used to measure the opposite side facessimultaneously and to acquire information concerning thicknessvariations of the stacking elements 12.

The height variations across the faces 56 and 58 of the stackingelements 12 can be treated as deviations from a desired flatness (orother intended shape) and can be filtered to remove higher ordervariations, leaving measures of low-order surface errors. For example,Fourier or Zernike filtering/decomposition can be used to transform theheight variations into one or more polynomials that describe the overallvariations in the shapes of the surfaces. Zernike polynomials can beformulated as combinations of radial and azimuthal terms through a rangeof orders for approximating the measured surfaces. The radial orders aresymmetric about a central axis of the stacking elements 12. Theazimuthal orders correspond to angular frequencies around the centralaxis.

The conventional Zernike polynomial set is orthogonal for a filledcircular area, but not necessarily for annuli, such as the faces 56 and58 of the illustrated stacking element 12. However, the amount ofnon-orthogonality is not expected to be an issue because the annuli aregenerally the same size from stacking element to stacking element soamplitudes are distorted equally and phase relationships are maintained.Those of skill in this art will readily recognize that, if required,modified orthogonal Zernike-like set polynomial sets can be generatedaccording to the shapes of the stacking element faces.

The filtering/decomposition transforms fit a range of predefinedpolynomial terms to the data by weighting their respective correlationssuch that the sum of the relatively weighted polynomial terms closelyapproximates the surface height variations. Among the terms, theazimuthal order weighted as most closely correlating with the heightmeasurements can be regarded as a primary angular frequency of themeasured surface.

FIG. 4 depicts a stacking element 80 that is color coded in gray scaleto illustrate measures of height measurements of a face 82. FIGS. 5A-5Cdepict three examples of decomposed polynomial shapes of Fourier orZernike transforms of a measured surface, such as the face 82, greatlyexaggerated to emphasize the decomposed surface forms as departures fromflatness. In particular, FIG. 5A depicts an annular two-lobe errorsurface, as mathematically defined by a second order azimuthal termhaving an angular frequency of two. FIG. 5B depicts an annularthree-lobe error surface, as mathematically defined by a third orderazimuthal term having an angular frequency of three. Thus, the primaryangular frequencies correspond to numbers of lobes projecting from thestacking faces along traces that circumnavigate the apertures. FIG. 5Cdepicts an annular surface having radial taper as defined by an evenorder radial term having a sign representing the direction of the taper.For exploiting the limited grouping and relative orientationpossibilities associated with assembling stacking elements, the faces,e.g., 82, of the stacking elements, e.g., 80, are characterized uponmeasurement by their principal azimuthal and radial order terms, i.e.,the azimuthal and radial orders having the highest weighting among thedecomposed azimuthal and radial order terms. The principal azimuthalorder term, referred to as a principal angular frequency, can bevisualized by the number of lobes in the exaggerated error surface. Theprincipal angular frequencies, like their underlying azimuthal orderterms, include a phase relative to the measured orientation of thestacking element, which can be referenced to a fiducial mark 84 on thestacking element 80. Thus, the measurements determine not only thenumber of lobes about an axis of the stacking elements but also thepositions of the lobes around the axis with respect to a fiducial mark.

FIGS. 6A and 6B depict a stacking element 86 in the form of a lensholder for holding a lens 87, including opposite side faces 90 and 92for assembling the stacking element 86 together with other stackingelements of an optical assembly. The stacking element 86 includes aseating ring 94 surrounding a central aperture for supporting aperiphery of the lens 87. An adhesive can be used for securing the lens87 to the seating ring 94. A number of through holes 96 provide forbolting the stacking element 86 together with other stacking elementsand other holes 98 provide for temporarily aligning the stackingelements with pins or the like. Any one of the holes 96 or 98 or otherfeatures of the stacking element 86 can be used as a fiducial mark forreferencing the measured low-order surface errors of the faces 90 and92.

An optical assembly 100, comprising the stacking element 86 togetherwith stacking elements 102, 104, and 106 is shown in FIGS. 7A and 7B.The optical assembly 100 can represent an entire optical assembly or asubassembly of a larger optical assembly intended to include additionalstacking elements. The stacking element 102 is a spacer, and stackingelements 86, 104, and 106 are lens holders for holding respective lenses87, 105, and 107. The stacking elements 86, 102, 104, and 106 providefor spacing and aligning the lenses 87, 105, and 107 along a commonoptical axis.

Information gained by measuring the opposite side faces 90 and 92 of thestacking element 86, together with the opposite side faces of thestaking elements 102, 104, and 106, can be used during assembly (or“build”) to reduce stresses or strains in the optical assembly 100. Themeasurements can be made of one or both faces, e.g., 90 and 92, of thestacking elements 86, 102, 104, and 106 intended to complete the opticalassembly 100 as well as of one or both faces of additional stackingelements that could be substituted into the assembly 100. Themeasurements of both faces, e.g., 90 and 92, of the stacking elements86, 102, 104, and 106 alone can be used to optimize the build of theassembly 100 by determining in advance of assembly a desired arrangementof the stacking elements 86, 102, 104, and 106. Alternatively, in situmeasurements made during assembly can be combined with measurements madeof the individual stacking elements 86, 102, 104, and 106 to determinethe desired arrangement of the stacking elements 86, 102, 104, and 106during assembly.

For example, the opposite side faces, e.g., 90 and 92, of the stackingelements 86, 102, 104, and 106 intended for the predefined opticalassembly 100 can be individually measured and low-order surface errorsextracted for determining the principal angular frequency and signedradial order of each of the faces, e.g., 90 and 92. Additional stackingelements as possible substitutes for one or more of the stackingelements 86, 102, 104, and 106 required for the predefined opticalassembly 100 can be similarly measured.

The stacking elements 86, 102, 104, and 106 are ordered as prescribedfor the optical assembly 100 and the low-order errors of the matingfaces of adjacent stacking elements are compared. The stacking elements86, 102, 104, and 106 are relatively rotated with respect to each otherto minimize the accumulation of low-order errors, particularly withrespect to the stacking elements 86, 104, and 106 that function as opticholders. For example, where the principal angular frequencies of matingstacking faces match or are harmonically related, the adjacent stackingelements are preferably relatively oriented to juxtapose low-ordersurface errors in a substantially complementary fashion. That is, theroot mean square of the low-order surface errors between the matingstacking faces is less than a root mean square of the low-order surfaceerrors of either of the mating stacking faces alone.

FIGS. 8A and 8B show two possible relative orientations of low-ordersurface errors having a principal angular frequency of two around acommon axis 130. The upper surface 110 in both illustrations representsthe low-order surface errors of a mating bottom face of an upperstacking element, and the lower surface 120 in both illustrationsrepresents the low-order surfaces errors of a mating top face of a lowerstacking element. Lobes 112 and 114 of the upper surface 110 projectdownwardly and troughs 116 and 118 of the upper surface 110 projectupwardly, both referenced with respect to the bottom face of the upperstacking element. Conversely, lobes 122 and 124 of the lower surface 120project upwardly and troughs 126 and 128 of the lower surface 120project downwardly, both referenced with respect to the top face of thelower stacking element. In FIG. 8A, the lobes 112 and 114 of the uppersurface 110 are rotationally aligned with the lobes 122 and 124 of thelower surface 120, and this arrangement that would produce contactstresses between the lobe pairings 112, 122, and 114, 124 that wouldtend to relatively distort the upper and lower stacking elements. Incontrast, the lobes 112 and 114 of the upper surface 110 in FIG. 8B arealigned with the troughs 126 and 128 of the lower surface 120, and thetroughs 116 and 118 of the upper surface 110 in FIG. 8B are aligned withthe lobes 122 and 124 of the lower surface 120. Thus, with respect toFIG. 8A, the lobes 112 and 114 of the upper surface 110 are relativelyrotated around the axis 130 in relation to the lobes 122 and 124 of thelower surface by the quantity π divided by the number of lobes in eachsurface 110 and 120, which in this instance equates to 90 degrees. Thedesired relative orientation of the upper and lower stacking elements inFIG. 8B, allows the upper and lower stacking elements to be securedtogether while imparting a minimum of stress.

Similar relative orientations between mating stacking faces can beachieved for mating stacking surfaces having similar or harmonicprincipal frequencies by relatively rotationally offsetting the measuredlobes of the mating surfaces to avoid localized contact stresses. Evenif the mating stacking surfaces do not have similar or harmonicprincipal frequencies, relative rotations between the adjacent stackingelements can be found to diminish contact stresses. Where possible,other measured stacking elements can be substituted into the assembly toprovide mating surfaces that can be oriented in a more complementaryfashion. Where each stacking element has a limited number of differentrelative rotational positions, e.g., because of securing throughpredrilled bolt holes, the best choice is made between the differentrelative rotational positions for minimizing contact stresses.

While high contact stresses are generally avoided, preference is givento avoiding contact stresses that could distort the stacking elementsfunctioning as optic holders. In this regard, cumulative errors in theassembly can also be considered. For example, any departures fromcomplementarity between mating stacking surfaces can be calculated asdifference surfaces that can be added together to track cumulativeerrors throughout the intended assembly. Instead of optimizingcomplementarity between the error surfaces of all of the mating stackingsurfaces, some deliberate departures from complementarity can beimparted to counteract cumulative errors that could otherwise distortoptic holders within the assembly.

The difference surfaces themselves can be similarly characterized interms of low-order errors. For example, normalized height measurementsof corresponding points can be compared between mating surfaces and thedifference measurements filtered/decomposed into low-order errors or thelow-order errors of the respective mating surfaces can be directlycompared to define the difference surfaces. At least the cumulativedifference surfaces are preferably characterized by their principalangular frequencies for comparison with the principal angularfrequencies of the mating surfaces intended to reduce the cumulativemismatch of other mating surfaces.

In addition to accounting for the principal angular frequencies of thelow-order errors characterizing the stacking faces, the signed radialorder of the low-order errors can also be considered. While differentradial order errors can generate some lines of stress, common radialorders of the same sign can produce even higher lines of stress oraccentuate points of stress combined with azimuthal order errors. Forexample, two radial tapers of the same sign would tend to generatedifference surfaces at twice the magnitude of the taper. However, tworadial tapers of opposite signs would tend to cancel any difference.Thus, where possible, the stacking elements are chosen or arranged sothat the radial orders of the low-order error surfaces have oppositesigns. Cumulative effects of the radial order errors can also be takeninto account when choosing or arranging the stacking elements to avoidoverstressing the optic holders.

Thus, the low-order surface errors of the premeasured stacking faces canbe used to prearrange stacking elements that can be secured together toform an optical assembly. The desired rotational orientations of theselected stacking elements can be marked, optics mounted within theoptic holders, and the stacking elements built into an optical assemblyin accordance with the marked rotational orientations of the stackingelements.

Alternatively, at least one face of the respective stacking elements canbe measured, such as the bottom face of each stacking element intendedto be mounted atop one another, and in situ measurements can be made ofthe top face of each stacking element as an exposed face of a growingassembly. During assembly, the exposed top face of a base stackingelement can be measured in situ using a measuring instrument such acoordinate measuring machine with an optical or mechanical probe or evenan interferometer for single surface measurement. Preferably, at leastthe principal angular frequency of the low-order surface errors evidentin the exposed stacking face is determined with respect to a rotationalfiduciary of the base stacking element. Based on the pre-measurement ofthe bottom face of a first adjoining stacking element for which aprincipal angular frequency is also determined and fiduciallyreferenced, the first adjoining stacking element can be relativelyoriented with respect to the base stacking element so that the low-ordersurface errors of the mating faces are substantially complementary asmay be admitted by the nature of the errors and the options for relativeorientation. With the base and first adjoining stacking elements securedin place, the exposed top face of the first adjoining stacking elementcan be similarly measured in situ, and the premeasured bottom face of asecond adjoining stacking element can be relatively arranged accordingto the same criteria. Where additional stacking elements are availableas substitutes, the adjoining stacking elements can be selected fromamong the available substitutes to best complement the low-order surfaceerrors of the exposed stacking faces. Generally, the optics are mountedin the stacking elements before securing the stacking elements together.

To further reduce cumulative errors affecting the lens holders,difference surfaces can be calculated between the in situ measuredlow-order surface errors of the exposed top faces of stacking elementsin the growing assembly and the premeasured low-order surface errors ofthe bottom faces of the adjoining stacking elements as relativelyrotated to promote complementarity (manifest as a reduction in theoverall magnitude of the difference surface). The difference surfaces,although minimized by the rotational orientations of the adjoiningstacking elements, can be added together as a measure of cumulativeerror. In addition to taking into account issues of complementaritybetween the top and bottom faces of the stacking elements growing theassembly, provisions can be made for accepting a lesser complementaritybetween mating faces to reduce the measured cumulative error that couldotherwise transmit stress or strain throughout the optical assembly. Forexample, the departure in complementarity of one pairing of matingstacking faces can be made at least partially complementary to thedeparture in complementarity of another pairing of mating stacking facesto avoid an accumulation of stress or strain between the pairings.

In FIG. 9, a flow chart shows basic steps for building and opticalassembly utilizing both pre-measurements of the stacking elements and insitu measurements of the growing assembly. Step 140 premeasures thefaces of a plurality of stacking elements. The measurements are filteredand decomposed into low-order surface errors characterizing the overallshapes of the stacking faces. Step 142 selects among the availablestacking elements to fulfill requirements of an optical assembly. Instep 142, the selection is deemed random among corresponding stackingelements, but optimum combinations of stacking elements could be chosenfrom among the available stacking elements based on premeasures of thelow-order surface errors of the opposite side faces of the stackingelements. Step 144 mounts optics within the optic holders of thestacking elements. Step 146 begins a cycle where in situ measurementsare made of an exposed face of a stacking element within a subassembly(i.e., a growing assembly) of the stacking elements. The in situmeasurements are similarly filtered and decomposed into low-ordersurface errors characterizing the overall shapes of the exposed stackingfaces. Step 148 retrieves the pre-measurement results of the mating faceof the next adjoining stacking element. Step 150 determines fromavailable choices a relative orientation of the adjoining stackingelement at which the low-order surface errors of the mating facesapproach complementarity. However, allowances can also be made forresidual departures in complementarity between other assembled pairingsof mating stacking surfaces to avoid cumulative errors in the growingassembly. Step 152 mounts the next adjoining stacking element asdetermined and reverts to the procedure to step 146 for orienting andmounting additional adjoining stacking elements to complete the desiredoptical assembly.

The invention can be practiced in a variety of other ways in accordancewith the overall teaching of the invention for utilizing measurements oflow-order surface errors in stacking elements to reduce stress or strainin optical assemblies.

1. A method of assembling a compound optic including a plurality ofstacking elements for spacing, aligning, and retaining optical elementscomprising steps of measuring stacking faces of a plurality of stackingelements that include optic holders, extracting from the measurementslow-order surface errors that can be represented by mathematicalapproximations having a primary angular frequency from the measurementsof the stacking faces, relatively positioning the stacking elementsincluding the optic holders in relative orientations that enhancecomplementarity between the low-order surface errors of mating stackingfaces, and securing the combinations of relatively oriented stackingelements together to control stress or strain that would otherwisedistort the optic holders in other relative orientations.
 2. The methodof claim 1 in which stacking elements include apertures, and the primaryangular frequencies correspond to numbers of lobes projecting from thestacking faces along traces that circumnavigate the apertures.
 3. Themethod of claim 2 in which the mating stacking faces have matchingnumbers of lobes that are relatively displaced in phase around theapertures by approximately π divided by the number of lobes.
 4. Themethod of claim 1 in which the low-order surface errors that can berepresented by mathematical approximations have a primary radial order,and the complementary low-order surface errors of the mating stackingfaces have a common primary radial order of opposite signs.
 5. Themethod of claim 1 including a step of determining residual low-ordersurface errors between mating stacking faces associated with anyremaining departures in complementarity.
 6. The method of claim 5including arranging pairings of mating stacking faces relative to otherpairings of mating stacking faces so that the departure incomplementarity of one pairing is complementary to the departure incomplementarity of another pairing to avoid an accumulation of stress orstrain between the pairings that would otherwise distort the opticholders within the combinations of stacking elements.
 7. The method ofclaim 1 including measuring an exposed stacking face of an intermediatestacking element secured to other stacking elements to measurecumulative low-order errors that can be represented by mathematicalapproximations having a primary angular frequency.
 8. The method ofclaim 7 including relatively orienting an additional stacking elementwith respect to the intermediate stacking element secured to the otherstacking elements so that mating stacking faces of the additional andintermediate stacking elements have substantially complementarylow-order surface errors with common primary angular frequencies.
 9. Themethod of claim 1 in which the step of measuring includes measuring thestacking faces, and the step of extracting includes filtering themeasurements to obtain measurements of low-order surface errors that canbe represented by mathematical approximations having a primary angularfrequency.
 10. The method of claim 9 in which the mathematicalapproximations include orthonormal polynomials having a radial order andan angular frequency referenced to datum feature on the stackingelements.
 11. The method of claim 10 in which the substantiallycomplementary low-order surface errors of the mating stacking faces havea common primary radial order of opposite signs and a common angularfrequency, and mating stacking faces are relatively displaced in phasearound apertures of the stacking elements by approximately π divided bythe angular frequency.
 12. The method of claim 1 in which the low-ordersurface errors represented by mathematical approximations include power,astigmatism, coma, trefoil and spherical aberration.
 13. The method ofclaim 12 in which a root mean square of the low-order surface errorsbetween the mating stacking faces is less than a root mean square of thelow-order surface errors of either of the mating stacking faces.
 14. Amethod of assembling a compound optic including a plurality of stackingelements for spacing, aligning, and retaining optical elementscomprising steps of measuring an exposed stacking face of anintermediate stacking element secured to other stacking elements of asubassembly to measure cumulative low-order errors in the exposedstacking face, measuring a side face of an adjoining stacking element tomeasure low-order errors in the side face, relatively orienting theadjoining stacking element with respect to the intermediate stackingelement of the subassembly so that mating exposed and side faces of theintermediate and adjoining stacking elements have substantiallycomplementary low-order surface errors, and securing the relativelyoriented adjoining stacking element to the intermediate stacking elementof the subassembly.
 15. The method of claim 14 in which the adjoiningstacking element can be secured to the subassembly in given number ofdifferent angular positions, the adjoining stacking element being aoptic holder, and the step of relatively orienting the adjoiningstacking element includes choosing the different angular position atwhich low-order surface errors of the mating exposed and side faces aremost complementary.
 16. The method of claim 14 in which the step ofmeasuring the side face of an adjoining stacking element includesmeasuring first and second opposite side faces of the adjoining stackingelement to measure cumulative low-order errors in the first and secondside faces of the adjoining stacking element prior to securing theadjoining stacking element to the subassembly.
 17. The method of claim16 including steps of measuring an exposed second side face of theadjoining stacking element secured to the subassembly to measurecumulative low-order errors in the exposed second side face, andcomparing the cumulative low order errors in the exposed second sideface to the cumulative low order errors of the second side face prior tosecuring the adjoining stacking element to measure the amount ofdistortion in the secured adjoining stacking element.
 18. A method ofassembling a compound optic including a plurality of stacking elementsfor spacing, aligning, and retaining optical elements comprising stepsof measuring opposite side stacking faces of a plurality of stackingelements that include optic holders, extracting from the measurementslow-order surface errors that can be represented by mathematicalapproximations having a primary angular frequency from the measurementsof each of the stacking faces, grouping the stacking elements includingthe optic holders in combinations and relative positions that juxtaposemating stacking faces having substantially complementary low-ordersurface errors, and securing the combinations of relatively orientedstacking elements together into an optical assembly according to theirgrouping to minimize stress or strain that would otherwise distort theoptic holders in other combinations.
 19. The method of claim 18 in whichthe step of measuring includes measuring more stacking elements thanrequired to assemble the optical assembly and the step of groupingincludes selecting among the stacking elements for inclusion within theoptical assembly to provide a combination at which the mating faces ofthe stacking elements are more complementary.
 20. The method of claim 18in which the low-order surface errors can be represented by mathematicalapproximations having a primary radial order, and the step of groupingincludes juxtaposing mating stacking faces having common primary radialorders of opposite signs.